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Ultra-high purity gas filter

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Ultra-high purity gas filter

Ultra-high purity gas filter

3A-GC ™ -TK ultra-high purity gas filter 3A-GC ™ -TK ultra-high purity gas filter series of products with ultra-high accuracy of 0.0025um, is an ultra-high precision product in the field of industrial filtration and purification It is precisely manufactured in a 100,000-level dust-free workshop. It has the characteristics of high precision, high temperature and high pressure resistance, and is mainly used in food, electronics, scientific research, chemical and other fields.

3A-GC ™ -TK Ultra High Purity Gas Filter

3A-GC ™ -TK ultra-high purity gas filter series products with ultra-high accuracy up to 0.0025um, are ultra-high precision products in the field of industrial filtration and purification. This series of products include

Coal bed gas filters are precisely manufactured in a 100,000-level dust-free workshop, with high precision, high temperature and high pressure resistance, and are mainly used in food, electronics, scientific research, chemical engineering, etc.

field.


Product performance parameters    


Features

■ Wide range of application, flow range from 15 to 300SL / min.

■ Good compatibility with most high-purity semiconductor process gases.

■ 3 nanometer filtration capacity maintains high flow efficiency and ultra-small pressure drop.

5Ra electro-polished surface prevents internal contamination.

■ Bake with hot nitrogen after cleaning with deionized water to meet semiconductor process standards.

■ 1 million class dust-free aseptic workshop manufacturing, cleaning and packaging environment.

■ Test for helium leaks.